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We’re minimizing
greenhouse gases
until we hit zero
We’re minimizing
greenhouse gases
until we hit zero
We’re minimizing
greenhouse gases
until we hit zero
Journey for sustainability Journey for sustainability Journey for sustainability
Three people walking along a tree-lined path in the forest

The importance of semiconductor technology is so immense that it is almost impossible to imagine a world without them.

 

However, with the geometrical increase in the demand for semiconductors, came a bigger impact on nature and the environment.

 

At Samsung Semiconductors, we produce our cutting-edge technologies sustainably by carefully developing, discovering, and adopting eco-friendly technologies that reduce carbon emissions and head toward zero impact on nature.

The importance of semiconductor technology is so immense that it is almost impossible to imagine a world without them.

 

However, with the geometrical increase in the demand for semiconductors, came a bigger impact on nature and the environment.

 

At Samsung Semiconductors, we produce our cutting-edge technologies sustainably by carefully developing, discovering, and adopting eco-friendly technologies that reduce carbon emissions and head toward zero impact on nature.

The importance of semiconductor technology is so immense that it is almost impossible to imagine a world without them.

 

However, with the geometrical increase in the demand for semiconductors, came a bigger impact on nature and the environment.

 

At Samsung Semiconductors, we produce our cutting-edge technologies sustainably by carefully developing, discovering, and adopting eco-friendly technologies that reduce carbon emissions and head toward zero impact on nature.

Samsung Semiconductor willingly
researches and develops
ways to reduce emissions.
Samsung Semiconductor willingly researches and develops ways to reduce emissions. Samsung Semiconductor willingly researches and develops ways to reduce emissions.

Samsung Semiconductor has long been making efforts to reduce the greenhouse gas inevitably produced when manufacturing semiconductors. We have been voluntarily reducing fluorine gas (F-gas) since 1999, when semiconductor manufacturers around the world signed an agreement at the World Semiconductor Council (WSC) to carry on the goal to reduce greenhouse gas emissions. In 2009, we installed and began the operation of an integrated greenhouse gas treatment facility to continue our efforts to reduce emissions. Since then, we’ve improved the treatment efficiency by expanding its use and developing catalysts.

Samsung Semiconductor has long been making efforts to reduce the greenhouse gas inevitably produced when manufacturing semiconductors. We have been voluntarily reducing fluorine gas (F-gas) since 1999, when semiconductor manufacturers around the world signed an agreement at the World Semiconductor Council (WSC) to carry on the goal to reduce greenhouse gas emissions. In 2009, we installed and began the operation of an integrated greenhouse gas treatment facility to continue our efforts to reduce emissions. Since then, we’ve improved the treatment efficiency by expanding its use and developing catalysts.

Samsung Semiconductor has long been making efforts to reduce the greenhouse gas inevitably produced when manufacturing semiconductors. We have been voluntarily reducing fluorine gas (F-gas) since 1999, when semiconductor manufacturers around the world signed an agreement at the World Semiconductor Council (WSC) to carry on the goal to reduce greenhouse gas emissions. In 2009, we installed and began the operation of an integrated greenhouse gas treatment facility to continue our efforts to reduce emissions. Since then, we’ve improved the treatment efficiency by expanding its use and developing catalysts.

Samsung Semiconductor’s RCS is
the first large-capacity, integrated greenhouse gas treatment facility in the semiconductor industry.
Samsung Semiconductor’s RCS is
the first large-capacity, integrated greenhouse gas treatment facility in the semiconductor industry.
Samsung Semiconductor’s RCS is the first large-capacity, integrated greenhouse gas treatment facility in the semiconductor industry.

What are the advantages of
treating process gas via RCS?
What are the advantages of
treating process gas via RCS?
What are the advantages of treating process gas via RCS?

The RCS (Regenerative Catalytic System) is a facility handling all the process gas with catalysts on the rooftop. 

The RCS was jointly developed with Samsung Semiconductor and Samsung E&A in 2007 and was first applied in the industry in 2009 as a large-capacity integrated greenhouse gas treatment facility. It is characterized by the fact that the outlets of all facilities are connected to the rooftop. Compared to Point of Use (POU), our RCS can treat process gas at a low temperature, reducing fuel consumption and generating less air pollutants. To further improve process treatment efficiency, Samsung semiconductor has developed and applied a 3rd-generation RCS catalyst to improve PFCs treatment efficiency to 97%.

 

By 2024, 4 additional RCS units were installed 1 production line, bringing the cumulative total to 52 units currently operational. Moving forward, we plan to continue expanding RCS installations not only in new production lines but also in existing lines, excluding cases deemed impossible.

The RCS (Regenerative Catalytic System) is a facility handling all the process gas with catalysts on the rooftop. 

The RCS was jointly developed with Samsung Semiconductor and Samsung E&A in 2007 and was first applied in the industry in 2009 as a large-capacity integrated greenhouse gas treatment facility. It is characterized by the fact that the outlets of all facilities are connected to the rooftop. Compared to Point of Use (POU), our RCS can treat process gas at a low temperature, reducing fuel consumption and generating less air pollutants. To further improve process treatment efficiency, Samsung semiconductor has developed and applied a 3rd-generation RCS catalyst to improve PFCs treatment efficiency to 97%.

 

By 2024, 4 additional RCS units were installed 1 production line, bringing the cumulative total to 52 units currently operational. Moving forward, we plan to continue expanding RCS installations not only in new production lines but also in existing lines, excluding cases deemed impossible.

The RCS (Regenerative Catalytic System) is a facility handling all the process gas with catalysts on the rooftop. 

The RCS was jointly developed with Samsung Semiconductor and Samsung E&A in 2007 and was first applied in the industry in 2009 as a large-capacity integrated greenhouse gas treatment facility. It is characterized by the fact that the outlets of all facilities are connected to the rooftop. Compared to Point of Use (POU), our RCS can treat process gas at a low temperature, reducing fuel consumption and generating less air pollutants. To further improve process treatment efficiency, Samsung semiconductor has developed and applied a 3rd-generation RCS catalyst to improve PFCs treatment efficiency to 97%.

 

By 2024, 4 additional RCS units were installed 1 production line, bringing the cumulative total to 52 units currently operational. Moving forward, we plan to continue expanding RCS installations not only in new production lines but also in existing lines, excluding cases deemed impossible.

RCS, the large-capacity integrated greenhouse gas treatment facility
The RCS treatment
process
The RCS treatment
process
The RCS treatment
process

15,238 thousand tons
of carbon emissions reduced in 2024
15,238 thousand tons of carbon emissions reduced in 2024 15,238 thousand tons of carbon emissions reduced in 2024

Samsung Semiconductor focuses on treating process gas and expanding the use of renewable energy to reduce carbon emissions at worksites. Each worksite estimates its annual greenhouse gas emissions, defines greenhouse gas mitigation tasks optimized to the manufacturing process and develops and implements reduction plans.

 

In 2024, we reduced a total of 15,238 thousand tons of greenhouse gases through greenhouse gas reduction projects, including the operation of process gas treatment facilities, use of renewable energy, improved process efficiency, and use of alternative gases.

Samsung Semiconductor focuses on treating process gas and expanding the use of renewable energy to reduce carbon emissions at worksites. Each worksite estimates its annual greenhouse gas emissions, defines greenhouse gas mitigation tasks optimized to the manufacturing process and develops and implements reduction plans.

 

In 2024, we reduced a total of 15,238 thousand tons of greenhouse gases through greenhouse gas reduction projects, including the operation of process gas treatment facilities, use of renewable energy, improved process efficiency, and use of alternative gases.

Samsung Semiconductor focuses on treating process gas and expanding the use of renewable energy to reduce carbon emissions at worksites. Each worksite estimates its annual greenhouse gas emissions, defines greenhouse gas mitigation tasks optimized to the manufacturing process and develops and implements reduction plans.

 

In 2024, we reduced a total of 15,238 thousand tons of greenhouse gases through greenhouse gas reduction projects, including the operation of process gas treatment facilities, use of renewable energy, improved process efficiency, and use of alternative gases.

Estimated greenhouse gas reductions at Samsung Semiconductor Worksites Estimated greenhouse gas reductions at Samsung Semiconductor Worksites Estimated greenhouse gas reductions at Samsung Semiconductor Worksites
Infographic showing greenhouse gas reduction performance in 2024 compared to 2023
Greenhouse gas reduction rate in 2024 Greenhouse gas reduction rate in 2024 Greenhouse gas reduction rate in 2024
Pie chart infographic showing greenhouse gas reduction rate in 2024

Reducing process gas from
semiconductor manufacturing
also means reducing carbon emissions.
Reducing process gas from semiconductor manufacturing
also means reducing carbon emissions.
Reducing process gas from semiconductor manufacturing also means reducing carbon emissions.

Reducing semiconductor process gas Reducing semiconductor process gas Reducing semiconductor
process gas
  • Using less process gas reduces
    greenhouse gas
  • Higher process gas treatment efficiency Achieving 97% or more through RCS
  • Alternative gas with low global warming potential replaced PFCs in several product processes

Samsung Semiconductor is making various efforts to minimize direct GHG emissions (Scope 1) from process gases and LNG used in semiconductor manufacturing. First, we applied GHG reduction technologies that significantly improve process gas treatment efficiency and is actively expanding the use of waste heat to gradually reduce fuel consumption. Additionally, we are developing technology to purify and reuse CO₂ generated during semiconductor manufacturing as a material resource, with plans to apply it to semiconductor manufacturing facilities by 2030.

Samsung Semiconductor is making various efforts to minimize direct GHG emissions (Scope 1) from process gases and LNG used in semiconductor manufacturing. First, we applied GHG reduction technologies that significantly improve process gas treatment efficiency and is actively expanding the use of waste heat to gradually reduce fuel consumption. Additionally, we are developing technology to purify and reuse CO₂ generated during semiconductor manufacturing as a material resource, with plans to apply it to semiconductor manufacturing facilities by 2030.

Samsung Semiconductor is making various efforts to minimize direct GHG emissions (Scope 1) from process gases and LNG used in semiconductor manufacturing. First, we applied GHG reduction technologies that significantly improve process gas treatment efficiency and is actively expanding the use of waste heat to gradually reduce fuel consumption. Additionally, we are developing technology to purify and reuse CO₂ generated during semiconductor manufacturing as a material resource, with plans to apply it to semiconductor manufacturing facilities by 2030.

We also endeavor
to save energy
consumed in the
manufacturing
process.
We also endeavor
to save energy
consumed in the
manufacturing
process.
We also endeavor
to save energy
consumed in the
manufacturing
process.
Infographic with CO2 written on a cloud, two batteries and a factory

Major efforts to reduce energy
consumption

  • Optimization of operating conditions* for production and auxiliary facilities
    * temperature, flow rate, etc.
  • Improvement of cooling performance by applying an optimized refrigeration system operation
  • Minimization of vent volume* by integrating the operation of air compression equipment
    * Minimum production volume
  • Optimization of exhaust air volume* through adjustment of damper opening rates in the facilities
    * Power consumption of exhaust fans

Projects are tailored to each manufacturing site to reduce energy consumption.

We endeavor
to reduce
fuel consumption
as well.
We endeavor
to reduce
fuel consumption
as well.
We endeavor to reduce fuel consumption as well.

We are actively promoting operational optimization, waste heat recovery, and the development of non-fuel-based equipment to reduce fuel usage within our sites. In particular, the latest lines are designed to recover waste heat from chillers year-rounds, significantly reducing LNG consumption for preheating outdoor air in air handling units. As a result, waste heat usage rate has been increased to 51% at the Giheung, Hwaseong, and Pyeongtaek sites in 2024.

We plan not only to continue introducing facilities replacing LNG-based heat sources but also to expand waste heat recovery to existing lines. We will also increase the waste heat utilization rate in new lines from 70% to over 90%.

We are actively promoting operational optimization, waste heat recovery, and the development of non-fuel-based equipment to reduce fuel usage within our sites. In particular, the latest lines are designed to recover waste heat from chillers year-rounds, significantly reducing LNG consumption for preheating outdoor air in air handling units. As a result, waste heat usage rate has been increased to 51% at the Giheung, Hwaseong, and Pyeongtaek sites in 2024.

We plan not only to continue introducing facilities replacing LNG-based heat sources but also to expand waste heat recovery to existing lines. We will also increase the waste heat utilization rate in new lines from 70% to over 90%.

We are actively promoting operational optimization, waste heat recovery, and the development of non-fuel-based equipment to reduce fuel usage within our sites. In particular, the latest lines are designed to recover waste heat from chillers year-rounds, significantly reducing LNG consumption for preheating outdoor air in air handling units. As a result, waste heat usage rate has been increased to 51% at the Giheung, Hwaseong, and Pyeongtaek sites in 2024.

We plan not only to continue introducing facilities replacing LNG-based heat sources but also to expand waste heat recovery to existing lines. We will also increase the waste heat utilization rate in new lines from 70% to over 90%.

Samsung Semiconductor
has been working tirelessly to reduce carbon emissions since 1999,
and now, we are heading
towards zero.
Samsung Semiconductor
has been working
tirelessly to reduce carbon
emissions since 1999,
and now, we are heading
towards zero.
Samsung Semiconductor
has been working tirelessly to reduce carbon emissions since 1999,
and now, we are heading
towards zero.

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