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Class

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Class

A unit for measuring the cleanliness of a semiconductor cleanroom.

In the semiconductor industry, the cleanliness of the production line environment is managed using the unit, ‘Class’. ‘Class’ is followed by a number which indicates the degree of cleanroom by a grade. This number usually represents the number of dust particles with a size of 0.1 ㎛ or larger in a cube measuring one foot (ft) high, wide and deep.

‘Class 1,000’ means there are less than 1,000 dust particles of 0.1 ㎛ or larger per cubic foot (ft³).
For example, ‘Class 1’ is comparable to a situation in which a single dust particle about 1/1000 size of the diameter of a human hair exists in a cubic foot (ft) of space.


 

What is “Class 1,000”? The degree of cleanliness in which there are less than 1,000 dust particles of 0.1 μm or larger per cubic foot (ft³)
What is “Class 1,000”? The degree of cleanliness in which there are less than 1,000 dust particles of 0.1 μm or larger per cubic foot (ft³)