반도체 제조공정에서 불가피하게 발생하는 온실가스 배출량을 줄이기 위해 삼성 반도체는 오래전부터 노력해왔습니다. 1999년, 세계반도체협의회(WSC)에서 반도체 업계의 온실가스 저감 추진 협약을 체결하자 삼성 반도체는 자발적으로 불소가스(F-gas)를 감축했습니다. 온실가스 배출량을 줄이기 위해 지속적으로 노력해 2009년에는 온실가스 통합처리시설을 설치해 운영하기 시작했고, 이후 점차 확대 적용 및 촉매 개발을 통해 처리효율을 향상했습니다.
RCS(Regenerative Catalytic System)는 촉매를 사용해 공정가스를 옥상에서 통합 처리하는 시설입니다. 모든 설비의 배출구가 옥상으로 연결되어 있는 점이 특징인데요. 타사의 개별처리시설(POU, Point of use)과 비교했을 때 삼성 반도체의 통합처리시설 RCS는 낮은 온도에서 공정가스 처리가 가능해 연료 사용을 절감할 수 있고 대기 오염 물질(Air pollutants) 발생도 적습니다. 삼성 반도체는 한 걸음 더 나아가 공정처리 효율을 높이기 위해 처리효율이 95%로 내구성이 뛰어난 RCS의 신규 촉매를 개발·적용해 공정가스 처리효율을 높였습니다. RCS는 2007년 삼성 반도체, 삼성 엔지니어링과 공동 개발해 2009년 업계 최초로 적용한 대용량 통합 온실가스 처리시설로, 2021년 현재까지 삼성 반도체만이 유일하게 사용하고 있습니다.
사업장의 온실가스 배출 저감을 위해 삼성 반도체는 공정가스 처리와 재생에너지 사용 확대에 집중하고 있습니다.
각 사업장은 매년 온실가스 배출량을 예상해 제조 공정에 최적화된 온실가스 감축 과제를 발굴하고 감축 계획을 수립하여
이행하는데요.
2020년에는 공정가스 처리설비 효율 개선, 고효율 설비 교체 및 제조공정 효율화 등 총 540개의 온실가스 감축 프로젝트를 통해 예상 배출량 대비 총 709만 1000톤의 온실가스를 감축했습니다. 이는 2019년 온실가스 감축량 대비 39% 증가한 성과입니다.
사업장 온실가스 감축 성과
2020년 온실가스 감축 비율
39%
재생에너지 사용 확대
1%
기타
10%
제조공정 효율화
18%
설비운전 효율화
32%
공정가스 처리
반도체 공정가스 감축
삼성 반도체는 온실가스를 지속적으로 감축하기 위해 공정가스 사용량 저감과 처리율 향상, 재생에너지 사용 확대, 공정 효율화를 통한 에너지 사용량 절감 등의 과제를 추진해오고 있습니다. 먼저 공정가스 투입량을 줄이기 위해 공정 시간, 공정 단계 및 공정법(Clean Recipe)을 최적화해 적용하고 있습니다. 또, 공정가스 처리시설의 효율을 높이기 위한 RCS 촉매를 개발해 공정가스 처리효율을 기존 90%에서 95% 이상으로 높였습니다. 지구온난화지수가 낮은 공정가스도 개발합니다. 반도체 주요 공정 중에서 4대 공정(Etch, Diff, CVD, Metal)에 적용되는 과불화탄소(PFCs)의 대체가스를 개발해 적용하고 있습니다. 2018년부터 일부 제품의 공정에서 PFCs가스를 대체하고 있고, 반도체연구소는 대체 가스의 연구 개발을 지속하고 있습니다.
주요 에너지 절감 활동
제조 사업장에서는 에너지 사용을 절감하기 위해 각 사업장 특성에 맞는 프로젝트를 추진합니다.
전력 사용량 절감을 위해 공정 개선, 전력 운전을 최적화해 메인 설비 테스트를 단축하고 부대설비 운전 온도 조건을 개선 및 고효율 설비 등을 실행하고 있습니다. 도시가스는, 냉각수 시스템과 열교환기를 활용한 폐열 회수와 외조기 공기 온도 및 유량 조정 등을 통해 LNG 사용량을 감축하고 있습니다.
① 전처리 스크러버
② RCS 설비
③ 후처리 스크러버
④ PFC 스크러버
⑤ 산 스크러버
RCS는 삼성 반도체가 최초로 개발하고 업계 유일하게 사용하는 대용량 통합처리시설입니다. RCS의 처리 과정은 다음과 같습니다. ① 전처리 스크러버(Scrubber)를 거쳐 고농도의 부식성 가스를 처리합니다. ② 처리된 가스가 RCS 시설로 이동해 촉매식 분해 과정을 거칩니다. 이 과정을 통해 1단계에서 처리한 가스가 고온(750℃)으로 분해되어 유해가스인 사불화탄소(CF4)와 지구온난화지수가 이산화탄소보다 2만 3900배나 높은 육불화황(SF6) 가스 등의 불소가스를 처리합니다. ③ 반도체 공정의 부산물을 정화하는 장비인 스크러버를 통해 촉매식 분해 과정에서 발생하는 불화수소(HF)를 후처리합니다. ④, ⑤ PFC 스크러버와 산 스크러버 과정을 거쳐 전 단계에서 분해된 가스를 다시 한번 처리해 냄새 등 오염물질을 제거해 대기에 방출합니다.
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