三星半导体一直在努力减少半导体制造过程不可避免会产生的温室气体。从 1999 年开始，我们一直自愿减少氟 (F) 气，当时全世界的半导体制造商在世界半导体理事会 (WSC) 上达成了协议，以实现减少温室气体排放的目标。2009 年，我们安装并开始运行一个一体式的温室气体处理设施，以帮助我们持续减少排放。从那时以后，我们通过扩大其使用范围并开发催化剂来提高处理效率。
RCS（再生催化系统）是一种可利用催化剂在屋顶处理所有工艺气体的设施。通过以较低温度处理工艺气体，
三星半导体 RCS
使用的燃料和排放的空气污染物都低于其他制造商广泛使用的使用点
(POU) 处理设施。然后，我们更进一步，为 RCS 开发出了更耐久的催化剂，处理效率高达 95%。RCS 是
2007 年联合三星工程部开发的大容量一体式温室气体处理设施，于
2009 年在半导体行业率先投用，并且在 2021
年以前仅三星半导体
独家使用。
三星半导体重视处理工艺气体，
并提高可再生能源的利用率，
以减少工作场所的碳排放。每个工作场所都会估计其年度温室气体排放量，确定根据制造工艺优化的温室气体减排任务，
并制定和实施
减排计划。
2021
年，通过开展温室气体减排项目，三星半导体的温室气体排放总量与估计排放量相比减少了
大约 603 万吨，
包括实施工艺气体处理设施效率项目、改用高效率设施以及简化
制造工艺等。
三星半导体工作场所的估计温室气体减排量
2021 年温室气体减排率
44%
利用可再生能源
0.1%
其他
12%
制造工艺提效
1%
设施运营提效
43%
工艺气体处理
减少半导体
工艺气体
为了不断降低温室气体排放，
三星半导体开展了多方面的工作，例如减少工艺气体的使用量、提高处理率、提高可再生能源利用率、通过高效的工艺和其他方法节省能耗等。首先，我们通过优化处理时间来减少工艺其他的使用。其次，我们开发了 RCS
催化剂来提高工艺气体处理设施的效率，从而将工艺气体处理效率从
90% 提高到 95% 以上。此外，三星半导体也在积极开发对全球变暖影响可能性较低的工艺气体。这种替代气体用来替代半导体制造四大工艺阶段使用的最主要温室气体之一全氟化碳
(PFC)：蚀刻、扩散、化学气相沉积和金属化。PFC 从 2018
年以来已经在多个产品的工艺中被替代。三星半导体研发中心继续开展替代气体研究和开发工作。
采取重要措施降低
能耗
根据各个制造现场的具体情况定制项目，以减少能耗。
为节省电力，
我们不断简化制造工艺，优化操作以主要设备测试的次数，提高辅助设施的温度条件，并实施高能效的设施。对于天然气，我们一直尝试通过冷却水系统和换热器来再利用废热，以及调节室外空气处理装置的空气温度和流率，从而减少液化天然气
(LNG) 的使用。
① 预处理
洗涤塔
② RCS 装置
③ 后处理
洗涤塔
④ PFC 洗涤塔
⑤ 酸洗涤塔
RCS 是一种大容量的处理设施，由三星半导体率先开发并独家使用。RCS 的处理过程如下：① 在使用洗涤塔进行预处理后，处理高浓度的腐蚀性气体。② 将处理后的气体输送到 RCS 中进行催化裂解，在步骤 ① 中处理的气体进行高温分解 (750℃)。这时会处理有害气体四氟化碳 (CF4) 和全球变暖影响可能性比二氧化碳高 23,900 倍的气体六氟化硫 (SF6)。③ 然后利用清除半导体工艺中残留时所用的洗涤塔，对催化分解后的氟化氢 (HF) 进行后处理。④, ⑤ 完成 PFC 洗涤塔和酸洗涤塔处理后，在上一步中裂解的气体将进行再次处理，以消除污染物并排放到大气中。
If you want a quick solution, check out
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